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Piezo Axis Stage Product List

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Wafer Observation Piezo Z-Axis Stage 'WP-Z-120A'

Piezo-driven electric Z-axis stage compatible with 300mm wafer observation

The WP-Z-120A is a Z stage with a millisecond drive speed, making it ideal for applications that require high-speed observation and processing. Designed for observing 300mm wafers, it has a load capacity of 8kg, allowing for the placement of heavy wafer chucks. Developed by Queensgate, which has continuously pursued faster and more precise control of piezo, this high-precision piezo product achieves smooth and stable operation across its entire 120-micron range, along with ultra-fast drive and convergence.

  • Other physicochemical equipment
  • Piezo Axis Stage

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